PRODUCTION ENGINEERING MEASURE FOR INSULATED GATE FIELD EFFECT TRANSISTORS.

Abstract

The work centered mainly in four areas: two new photolithographic mask sets were devised to insure the necessary geometrical variations were investigated. These new sets will enable both epitaxial and nonepitaxial techniques to be more fully developed; stable processing steps were formulated with results shown on capacitance-voltage plots; advanced devices were fabricated using information obtained from the initial production group; reliability information was compiled and certain conclusions were drawn. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 31, 1966
Accession Number
AD0641401

Entities

People

  • Dale Reinke
  • Harry Forehand
  • James K. George
  • Myint Hswe

Organizations

  • Motorola Mobility

Tags

DTIC Thesaurus Topics

  • Capacitance
  • Engineering
  • Field Effect Transistors
  • Production
  • Production Engineering
  • Production Management Methods
  • Productivity
  • Reliability
  • Transistors

Readers

  • Semiconductor Device Technology
  • Systems Analysis and Design
  • Theoretical Analysis.

Technology Areas

  • Microelectronics