TUNED INTEGRATED CIRCUITS.
Abstract
Apparatus and improved procedures for the vacuum co-evaporation of thick CdS films (5 to 15 microns) are described. A correlation between the thickness of CdS film piezoresonators, their resonant frequency and the electrode areas, required for the 50 ohm impedance matching, was worked out. First film resonances (as distinguished from substrate resonances) with Q of about 15 were observed in gold-CdS-gold piezoelectric structures, deposited on thin and thick glass substrates.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1966
- Accession Number
- AD0643519
Entities
People
- S. M. Zalar
- W. E. Newell