PIEZORESISTIVE STRAIN GAGE ACCELEROMETERS.

Abstract

Semiconductor strain gages have been successfully integrated by diffusion into silicon spring members, resulting in microelectronic transducers. This concept of using force as an input parameter to an integrated circuit has been shown to be feasible for many military applications including accelerometers, pressure transducers, and vibration pickups. The principal topics covered in this report are (1) characterization of integrated semiconductor strain gage materials, (2) theory of integrated transducer design for a military environment, (3) integrated circuit force sensor fabrication techniques, and (4) design, fabrication, and evaluation of a typical accelerometer. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1966
Accession Number
AD0643751

Entities

People

  • E. J. Evans

Organizations

  • Picatinny Arsenal

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Accelerometers
  • Circuits
  • Fabrication
  • Gages
  • Integrated Circuits
  • Materials
  • Military Applications
  • Pressure Transducers
  • Semiconductors
  • Strain Gages
  • Transducers

Readers

  • Aerospace Test and Evaluation
  • Integrated Circuit Design and Technology.
  • Mechanical Engineering/Mechanics of Materials.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems