MINIATURE SEMICONDUCTOR PRESSURE SENSOR,

Abstract

It is concluded that the application of strain-gauge elements made from dendritic germanium foil for miniature pressure sensors is very promising because these strain-gauge elements can be made minimally small, for example, 1.5 - 2 mm long, 0.2 - 0.3 mm wide and 0.15 - 0.2 mm thick, and even smaller. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 29, 1966
Accession Number
AD0643931

Entities

People

  • I. I. Smyslov
  • L. A. Osipovich

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Electronics
  • Elements
  • Gages
  • Germanium
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Semiconductors
  • Silicon Carbide
  • Solid State Electronics
  • Strain Gages

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Integrated Circuit Design and Technology.
  • Neuroscience

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems