INTEGRATED CIRCUITS FOR PORTABLE RADAR EQUIPMENT.

Abstract

Experimental results, and a theoretical description for vapor etching GaAs with HCl in H2 and H2 + AsH3 gas mixtures, are presented. Optical microscopy and surface profile studies of various surfaces have been performed to relate the initial substrate surface to the resulting germanium growth surface. These surface studies were made for selective and non-selective etch and deposition processes. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1966
Accession Number
AD0645047

Entities

People

  • E. Clayton Teague

Organizations

  • Texas Instruments

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Circuit Testers
  • Circuits
  • Electrical Circuits
  • Electrical Equipment
  • Electronic Circuits
  • Electronic Equipment
  • Germanium
  • Integrated Circuits
  • Microscopy
  • Modules (Electronics)
  • Radar
  • Radar Equipment
  • Substrates
  • Test Equipment

Fields of Study

  • Materials science

Readers

  • Aerospace Test and Evaluation
  • Thin Film Deposition Science.