MICROBONDS FOR HYBRID MICROCIRCUITS.
Abstract
The overall objective of the program was the development of reliable high yield processes for bonding fine wires of gold and aluminum to gold-chromium and aluminum films on various substrates such as alumina, sapphires, and oxidized silicon. Furthermore, techniques were to be developed and evaluated for fabricating Micro-Circuit Modules (MCM) stacks and joining standard flat-packs to multilayer circuit boards by means of resistance welding and for ultrasonically bonding of flip-chip transistors to gold-chromium films on as-fired alumina. Fine wire bonds of aluminum wire to aluminum films made by ultrasonic bonding were studied. Statistical analysis of the quality and reproducibility of these bonds is presented. Also, a summary of the results on the fine wire microbonds studied during the program is presented. The application of parallel gap welding to the fabrication of MCMs was demonstrated as a practical technique for prototype or limited production of MCMs. Welding of MCM stacks consisting of alumina, glazed alumina, Be0 and sapphire wafers were studied. The parallel-gap welding of flat-packs to multilayer wiring boards having surface layers of gold-nickel plated copper, gold plated nickel and alnifer conductors were studied. Statistical comparisons of the quality and reproducibility of these bonds are presented. The evaluation of a limited study of the mechanical quality and performance of ultrasonically bonded flip-chips is presented. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1967
- Accession Number
- AD0647464
Entities
People
- A. R. Riben
- S. L. Sherman
Organizations
- United Aircraft Corporation