PHYSICAL EVALUATION OF THIN FILMS OF SOLID STATE MATERIALS.

Abstract

Experimental methods include reflection electron diffraction, X-ray diffraction and fluorescent analysis, electron probe microanalysis and light microscopy in addition to the determination of specific properties, such as density, hardness and index of refraction. The materials submitted for analysis include electrodeposits of copper on single crystal copper substrates, vapor deposits of boron phosphide and silicon carbide on selected substrate hosts, high perfection germanium, synthetic and natural spinels and crystals of lithium germanate, calcium tartrate and cuprous chloride. In addition, special services such as crystal orientation and cutting have been performed. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1967
Accession Number
AD0647600

Entities

People

  • Edward T. Peters

Tags

DTIC Thesaurus Topics

  • Ceramic Materials
  • Crystals
  • Diffraction
  • Electron Diffraction
  • Electron Probes
  • Films
  • Materials
  • Refraction
  • Refractive Index
  • Silicon Carbide
  • Single Crystals
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene