ADVANCED INTEGRATED CIRCUIT DEVELOPMENT.

Abstract

The report describes work done toward developing processes for the fabrication of NPN, PNP, and field effect devices in a monolithic chip. A method for producing material containing dielectrically isolated N and P type collector regions of homogeneous single crystal silicon was devised and developed. A diffusion flow process for the production of a monolithic operational amplifier circuit containing NPN transistors, PNP transistors, MOS field effect devices, and thin film resistors was investigated. Techniques involved in fabricating this circuit and the processing difficulties encountered are discussed. The characteristics of the devices and of the operational amplifier circuit are reported. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1967
Accession Number
AD0647834

Entities

People

  • Clyde Combs
  • Gordon Taylor

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Amplifiers
  • Circuits
  • Electronic Amplifier
  • Film Resistors
  • Films
  • Integrated Circuits
  • Materials
  • Npn Transistors
  • Operational Amplifiers
  • Pnp Transistors
  • Resistors
  • Single Crystals
  • Thin Film Resistors
  • Thin Films
  • Transistor Amplifiers
  • Transistors

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.