REACTIVELY SPUTTERED CERMET RESISTORS.
Abstract
A dual cathode sputtering technique for creating thin cermet films is described in this report. This technique was actually used to produce four types of mixtures: gold-tungsten oxide, platinum-tungsten oxide, platinum tantalum oxide, and gold tantalum oxide. Various resistor parameters are presented for all of the films. However, the emphasis is on the gold tantalum mixtures which gave a zero temperature coefficient at approximately 6 to 8 thousand ohms per square sheet resistivity. A summation is presented on this work and suggestions for further efforts in this field. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1967
- Accession Number
- AD0648018
Entities
People
- Clyde H. Lane
- John P. Farrell