TUNED INTEGRATED CIRCUITS.
Abstract
By more precise control over the density of cadmium molecular vapors, important improvements in the fabrication of CdS thick films (5-20 microns) have been achieved. Studies of the piezoelectric performance of metal-CdS-metal structures, vacuum deposited on glass substrates and acoustically activated within the frequency range of 100 to 300 MHz, indicate that CdS film resonances appear mostly in the form of envelope-modulation of substrate resonances. In order to incorporate substrate resonances more constructively into the metal-CdS-metal structure, thermally grown silica membranes (up to 11 microns thick) have been produced. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1967
- Accession Number
- AD0650189
Entities
People
- S. M. Zalar
- W. E. Newell