DEPOSITION OF CARBON ON DIAMOND SEED CRYSTALS,

Abstract

Progress was made towards establishing the practicality of growing diamond crystals at low pressures for potential device application. The program of depositions of carbon on diamond seed crystals was continued and non-graphitic surface layers were still found deposited on diamond from methane gas. The crystallographic nature of these layers is being investigated by X-ray and electron diffraction and precision density measurements. The evidence from many experiments, although not conclusive, indicates the surface layers are diamond. The experimental equipment was modified to permit wider variations in deposition conditions and the addition of a dopant gas. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 20, 1967
Accession Number
AD0651059

Entities

People

  • Herbert Will
  • John C. Angus

Organizations

  • Case Western Reserve University

Tags

DTIC Thesaurus Topics

  • Diffraction
  • Electron Diffraction
  • Electrons
  • Measurement
  • Precision
  • Pressure Measurement
  • Wave Phenomena
  • X Rays

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene