DEVELOPMENT OF DIFFRACTION GRATINGS FOR THE FAR ULTRAVIOLET.

Abstract

Work on procedures of ruling gratings for the far ultraviolet is reported in the following areas: (1) Ruling tools other than diamond. (2) Improvements in tool shape and lubrication. (3) Ruling properties of glass surfaces--fire polish versus pitch and felt polish; and composition. (4) Resists and management of etching by ultrasonic agitation. (5) Etching by ion bombardment. (6) Interpretation of electron microphotographs of grating grooves. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1967
Accession Number
AD0655098

Entities

People

  • J. F. Mcclellan
  • John Strong

Organizations

  • Johns Hopkins University

Tags

DTIC Thesaurus Topics

  • Diffraction
  • Electrons
  • Gratings (Spectra)
  • Ion Bombardment
  • Lubrication
  • Subatomic Particle Manipulation
  • Subatomic Particles

Readers

  • Metallurgy
  • Nanofabrication and Microfabrication.
  • Reinforced Composite Materials

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems