METHOD OF PUMPING OF VACUUM SYSTEMS,

Abstract

The article describes a method of pumping out vacuum systems with the aid of sorption pumps, which for the purpose of removing inert gases and attaining a higher vacuum, the system of periodically flushing out with gaseous nitrogen is used. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 27, 1967
Accession Number
AD0656564

Entities

People

  • E. N. Martinson
  • V. I. Plechev

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Elements
  • Group 15 Elements
  • Nitrogen
  • Sorption

Fields of Study

  • Physics

Readers

  • Electrical Engineering
  • Systems Analysis and Design
  • Thin Film Deposition Science.