THEORY OF GAS-SURFACE COLLISIONS,
Abstract
A theory of gas surface interaction should predict the distribution of molecules re-emitted from a surface in function of the properties of the incident flux and the physics of the surface. It depends on our uncertain knowledge of free-bound heterogeneous molecule interactions and our equally uncertain knowledge of atomic lattice dynamics. The paper critically summarizes and compares with experimental results an increasingly detailed lattice model which gives plausible energy exchange predictions and a geometrical (hard cube) model which shows promise as a correlator of data on scattering direction distribution. Both these models are based on classical interaction mechanisms; some potential generalizations to quantum models are suggested. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1966
- Accession Number
- AD0657795
Entities
People
- Leon Trilling
Organizations
- Massachusetts Institute of Technology