HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
The program was devoted to the preparation and investigation of two novel kinds of electron-beam-addressable storage elements of submicron size and densely-packed arrays of these elements. One such element, called a micron-cap consists of an isolated microcapacitor at the bottom of a hole in a metal/dielectric/metal film sandwich. The other element, called a micron-ring, consists of an isolated metal film ring embedded concentrically with a hole in the dielectric of a multilayer metal/dielectric film sandwich. Storage and readout data on micron-cap elements were taken at low beam energies (near to the lower unity-crossover energy for secondary emission). System changes were made to allow higher sensitivity and higher-speed operation, as well as to facilitate high-beam-energy investigations. The mildly bakeable (400C) field emitter and molybdenum lens system and the associated commercial ultra-high-vacuum system have been assembled, the manipulators tested and found satisfactory, and beam measurements begun. Work on storage structures is being concentrated on attempts to wake regular arrays with a commercial electron probe; capability of producing approximately 10,000 elements in a field has been shown. Attempts are underway to make micron-ring elements using the same electron probe to polymerize electron-sensitive resist in the critical step of forming the ring. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1967
- Accession Number
- AD0659789
Entities
People
- John Kelly
- Kendal T. Rogers
Organizations
- SRI International