HIGH PERFORMANCE THIN FILMS FOR MICROCIRCUITS.
Abstract
Thin film test resistors have been fabricated with different deposition times. Resistance vs. temperature tests have been made on some samples ranging from 6 to 570 ohms/square. A temperature coefficient of resistance (TCR) curve was plotted from -25 to +150C for samples fabricated in the same manner. The TCR value for these samples ranges from +1000 ppm to -70 ppm, depending upon the sheet resistance of the sample. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1967
- Accession Number
- AD0660319
Entities
People
- Franz Huber
- Joseph H. Mitchell
- Morton L. Topfer
- William H. Laznovsky