INSTRUMENT FOR CONTACTLESS MEASURING OF PARAMETERS OF THIN SEMICONDUCTIVE FILMS,

Abstract

A device for rapid measurement of parameters of semiconductor films is described. The apparatus removes the need for direct contact of electrodes upon test specimens and permits the study of parameter distribution along the film, as well as the investigation of kinetic photoelectric processes. A circuit diagram of the device is given. Special elements in its network include a 6NZP lamp and an ENO-1 oscillograph. The authors describe in detail the functions of the more important items in the network, paying particular attention to the use of electrodes on two types of measurement condensers. A discussion of the variation of network current with different semiconductor film sizes and types is given. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 21, 1967
Accession Number
AD0661905

Entities

People

  • I. B. Shulga
  • M. K. Sheinkman

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Electrodes
  • Electronics
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Measurement
  • Measuring Instruments
  • Oscillographs
  • Semiconductors
  • Solid State Electronics

Readers

  • Electrical Engineering
  • Theoretical Analysis.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems