RADIATION EFFECTS ON THIN-FILM INTEGRATED CIRCUIT ELEMENTS.
Abstract
Efforts were directed toward (1) an experimental determination of the differences in the charge change induced by 600 kV FXR and 2 MV FXR irradiations, 18 MeV LINAC electron, and bremsstrahlung from 18 MeV electrons; (2) the dependence of the radiation induced charge change on substrate thickness for thicknesses near the range of the most energetic Compton electrons, and (3) the effectiveness of a guard ring in limiting the charge change which is neutralized by a circular disc conductor. The experiments performed in each of the above areas are described and the resulting data presented. The presented data shows that (1) charge change is a decreasing function of incident radiation energy, (2) induced charge change decreased with decreasing substrate thickness within the thickness range of 0.0005 inch < or = x < or = 0.004 inch, and (3) a guard ring surrounding a circular disc conductor pattern, when biased independently but at the same potential as the circular disc portions, confines the region of charge imaged by the disc to that region immediately behind the disc. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1967
- Accession Number
- AD0662702
Entities
People
- A. F. Krueger
- V. H. Strahan