ELECTRON PROBE ANALYSIS OF SEMICONDUCTORS.

Abstract

The report summarizes the research in electron probe analysis of semiconductors. Contributions were made in the following areas: (1) Cathodoluminescence Microscopy, (2) Diffusion and Recombination of Excess Carriers in GaAs, (3) Electron Microprobe Instrumentation, and (4) Quantitative Electron Probe Microanalysis. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1967
Accession Number
AD0663242

Entities

People

  • David B. Wittry
  • David F. Kyser

Organizations

  • University of Southern California

Tags

DTIC Thesaurus Topics

  • Cathodoluminescence
  • Compound Semiconductors
  • Diffusion
  • Electron Probes
  • Electronics
  • Electrons
  • Instrumentation
  • Measuring Instruments
  • Microanalysis
  • Microprobes
  • Microscopy
  • Probes
  • Semiconductors
  • Solid State Electronics

Fields of Study

  • Materials science

Readers

  • Plasma Physics.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics