HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
The program is devoted to the preparation and investigation of two novel kinds of electron-beam-addressable storage elements of submicron size and densely packed arrays of these elements. One such element, called a micro-cap, consists of an isolated microcapacitor at the bottom of a hole in a metal/dielectric/metal film sandwich. The other element, called a micro-ring, consists of an isolated metal film ring embedded concentrically with a hole in the dielectric of a multilayer metal/dielectric film sandwich. During this quarter, storage and readout data on micro-cap elements were taken at high beam energies (around and above the upper unity-crossover energy for secondary-electron emission and up to the bombardment-induced conductivity energy) for data storage. Beam measurements are reported on the mildly bakeable (400 degrees C) field emitter and molybdenum lens system in its commercial ultra-high-vacuum system. Work on storage structures is being concentrated on attempts to make regular arrays with a commercial electron probe. Progress on the use of this instrument and on the steps of etching subsequent to the line-ruling is reported. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1968
- Accession Number
- AD0665634
Entities
People
- James F. Kelly
- K. T. Rogers
Organizations
- SRI International