HIGH PERFORMANCE THIN FILMS FOR MICROCIRCUITS.

Abstract

The TCR-vs.-ohms/sq. curve for hafnium thin-film resistors prepared on glass substrates is plotted and compared to that of samples prepared on glazed ceramic substrates. A technique for forming fine-line (0.5 mil) resistor patterns of hafnium has been developed. MOM capacitors and chip-size resistors using hafnium technology and related anodization processing were fabricated on passivated silicon wafers. Details of the work on hafnium-dioxide insulated MOS devices are presented. In addition, evaluation of the hafnium-dioxide films using C-V measurements is reported. A multivibrator circuit has been chosen as an experimental vehicle. The layout and masks for this circuit are presented. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1968
Accession Number
AD0666776

Entities

People

  • Joseph H. Mitchell
  • Morton L. Topfer
  • Robert L. Schelhorn

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Anodizing
  • Capacitors
  • Circuits
  • Electronic Components
  • Electronic Equipment
  • Film Resistors
  • Films
  • Fixed Resistors
  • Measurement
  • Microcircuits
  • Multivibrators
  • Passive Electronic Components
  • Resistors
  • Substrates
  • Thin Film Resistors
  • Thin Films

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems