INVESTIGATION OF THE ENERGY SPECTRA OF ATOMS SPUTTERED FROM A TUNGSTEN SINGLE CRYSTAL BY MERCURY IONS,
Abstract
In order to clarify the cathode sputtering mechanism, the sputtering of single crystals was studied with particular attention given to a comparison of conditions required for yielding sputtered particles in various crystallographic directions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 30, 1967
- Accession Number
- AD0668157
Entities
People
- M. B. Benyaminovich
- R. A. Ashmyanskii
Organizations
- National Air and Space Intelligence Center