INVESTIGATION OF THE ENERGY SPECTRA OF ATOMS SPUTTERED FROM A TUNGSTEN SINGLE CRYSTAL BY MERCURY IONS,

Abstract

In order to clarify the cathode sputtering mechanism, the sputtering of single crystals was studied with particular attention given to a comparison of conditions required for yielding sputtered particles in various crystallographic directions.

Document Details

Document Type
Technical Report
Publication Date
Aug 30, 1967
Accession Number
AD0668157

Entities

People

  • M. B. Benyaminovich
  • R. A. Ashmyanskii

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Crystals
  • Particles
  • Single Crystals
  • Spectra
  • Sputtering
  • Tungsten

Readers

  • Plasma Physics.
  • Thin Film Deposition Science.