ANALYSIS OF THERMAL DECOMPOSITION OF TETRAETHOXYSILANE BY GAS CHROMATOGRAPHY.

Abstract

Tetraethoxysilane was thermally decomposed in apparatus similar to that used by the electronics industry to deposit silicon dioxide. A study of the decomposition reaction was made from the aspect of collected products. The reaction products were collected and analyzed by gas-liquid chromatography, and a mixture of acetaldehyde, ethane, ethanol, and ethylene was found. Comparison with the thermal decomposition products of diethyl ether suggests possible mechanisms for the decomposition of tetraethoxysilane. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1968
Accession Number
AD0675398

Entities

People

  • George W. Heumisch

Organizations

  • United States Army Communications-Electronics Command

Tags

DTIC Thesaurus Topics

  • Acetaldehyde
  • Alkenes
  • Analytical Chemistry Techniques
  • Chemical Compounds
  • Chromatography
  • Decomposition
  • Dioxides
  • Electronics
  • Electronics Industry
  • Ethylenes
  • Gas Chromatography
  • Liquid Chromatography
  • Organic Compounds
  • Silicon
  • Silicon Dioxide

Fields of Study

  • Chemistry

Readers

  • Organic Chemistry
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics