AN INVESTIGATION FOR FABRICATING AND EVALUATING THE PROPERTIES OF CHEMICALLY VAPOR DEPOSITED ALUMINA AND MAGNESIA.

Abstract

The chemical vapor deposition technique for aluminum oxide was investigated and transparent, theoretically dense, alpha-aluminum oxide was produced. By varying the deposition conditions, white opaque material could be produced; theta-aluminum oxide could be co-deposited with the alpha and both isotropic and anisotropic aluminum oxide could be produced. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1968
Accession Number
AD0676150

Entities

People

  • Ray C. Ellis

Organizations

  • RTX

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Oxides
  • Chemical Vapor Deposition
  • Films
  • Materials
  • Materials Processing
  • Oxides
  • Vapor Deposition

Readers

  • Materials Science and Engineering.
  • Surface Engineering/Surface Coating Technology.