REDUCTION OF CHLORIDES OF SILICON AND GERMANIUM AND FORMATION OF CRYSTALLINE FILMS,

Abstract

As a result of the reaction of reduction of silicon and germanium chlorides by hydrogen, crystalline silicon and germanium films of a high degree of purity are obtained. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1960
Accession Number
AD0677092

Entities

People

  • A. I. Melnikov

Organizations

  • General Dynamics

Tags

DTIC Thesaurus Topics

  • Alloys
  • Chemical Compounds
  • Chlorides
  • Elements
  • Germanium
  • Germanium Alloys
  • Germanium Compounds
  • Hydrogen
  • Metallic Compounds
  • Metalloid Alloys

Readers

  • Thin Film Deposition Science.