DEVICE FOR MANUFACTURING FILM CIRCUITS,

Abstract

The Author Certificate presents a device for manufacturing film circuits. The device contains a vacuum chamber equipped with evaporators of the materials deposited on the base. The device also has moving film holders used for fastening the bases and masks, a base heater, and a microscope set into the vacuum chamber. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1967
Accession Number
AD0677222

Entities

People

  • A. P. Rumyantsev
  • F. A. Koleda

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Absorbers (Materials)
  • Chambers
  • Evaporators
  • Manufacturing
  • Materials
  • Microscopes
  • Vacuum
  • Vacuum Chambers

Readers

  • Combustion and Flow Dynamics.
  • Software Engineering
  • Thin Film Deposition Science.