SPUTTERING OF STAINLESS STEEL WITH H (+) sub 1 IONS AND THEIR PENETRATION INTO THE SURFACE,
Abstract
The coefficient of sputtering, alpha, of stainless steel, 18N9T, with H(+) sub 1 of 35 keV, and of penetration of the ions into the surface, eta, were detected by the method described previously (loc. cit.). Not the change in the weight of the target, delta P sub t, but the change in the weight of the collector, delta P sub c, should be used in the calculation of alpha on the other hand, in the calculation of eta the sum of the two should be used: alpha = delta P sub c/ (9.3 x 10 to the minus 23 power i/qt) and eta = (delta P sub c + delta P sub t)/(1.67 x 10 to the minus 24th power i/qt), where i is the current of the beam H(+) sub 1, q is the electron charge, and t is the duration of sputtering. At pressures p < or = 10 to the minus 9th power mm, alpha = 0.009 and eta = 0.5. The effect of CO, O, CH4, CO2, and H2O was detected.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 15, 1967
- Accession Number
- AD0678469
Entities
People
- E. S. Borovik
- G. T. Nikolaev
- N. P. Katrich
Organizations
- National Air and Space Intelligence Center