SEMICONDUCTOR PROCESSING APPLIED TO INTEGRATED CIRCUIT FABRICATION
Abstract
The note describes the processing steps and technical considerations involved in fabricating bipolar integrated circuits. Basic processes and examples of the use of these to fabricate semiconductor devices are illustrated. A bibliography of basic references to the technology and a short list of current, useful textbooks on the present state of the art are also included.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 26, 1968
- Accession Number
- AD0679560
Entities
People
- Robert W. Mountain
- Ronald A. Cohen
Organizations
- Massachusetts Institute of Technology