DETERMINATION OF OXYGEN CONTENT IN GERMANIUM AND SILICON BY He3 ION ACTIVATION,

Abstract

In connection with the necessity of selecting a material suitable for the manufacture of spectrometric nuclear radiation detectors, a technique has been developed for oxygen determination in germanium and silicon by He3 ion bombardment. The possibility of analysis of gallium arsenide, tungsten, silicon carbide, and other materials is demonstrated. The sensitivity of the method is 0.0000007 percent. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1968
Accession Number
AD0680364

Entities

People

  • A. M. Demidov
  • G. A. Kotelnikov
  • G. I. Aleksandrova
  • G. P. Pleshakova
  • G. V. Sukhov

Tags

DTIC Thesaurus Topics

  • Ceramic Materials
  • Compound Semiconductors
  • Detectors
  • Gallium Arsenides
  • Germanium
  • Ion Bombardment
  • Materials
  • Nuclear Radiation
  • Radiation
  • Silicon
  • Silicon Carbide

Fields of Study

  • Physics

Readers

  • Combustion science or combustion engineering.
  • Semiconductor Device Technology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics