HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
This program is devoted to the preparation and investigation of novel electron-beam-addressable storage mosaics and the construction of an experimental, large-capacity, high-speed data-storage system based on the use of such mosaics. Current emphasis is on so-called micro-cap mosaics, the elements of which are discrete, submicron-size capacitors at the bases of regular arrays of closely spaced holes in molybdenum/alumina/molybdenum film sandwiches. The technique of using a fine-mesh screen as an array of electrostatic lenses for resist exposure has been extended to the formation of images having about 0.5-micrometer spots spaced on about 1-micrometer centers. However, a larger illumination cathode is needed for obtaining more uniform exposure. Selective etching of alumina films with molybdenum as the resist is performed with a directed beam of tantalum fluoride, formed by reacting lead fluoride with tantalum. Modifications to the molybdenum lens system are described, which have resulted in very stable performance of the system, and useful storage and readout results are now being obtained therefrom. Development of the high-speed readout circuitry required has been initiated. Progress on the computer-aided design of lens/deflector systems capable of scanning 100,000,000 elements per field for storage mosaic address is covered. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1968
- Accession Number
- AD0681892
Entities
People
- L. N. Heynick
Organizations
- SRI International