AN AUTOMATIC STEP-AND-REPEAT CAMERA,

Abstract

The report describes an automatic step-and-repeat camera for integrated circuit fabrication. This step-and repeat camera has a continuously variable reduction ratio with final size and focus directly controlled in the camera. Any angular misalignment of the image is corrected without external instrumentation. The control system and other associated components were chosen to minimize cost. The camera is adequate for research laboratory where problems of high rate of mask production are not encountered. It is capable of handling 1/4-mil dimensions as they appear in silicon integrated microcircuits. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1968
Accession Number
AD0682068

Entities

People

  • C. H. Klute
  • R. B. Beams Jr.

Organizations

  • Harry Diamond Laboratories

Tags

DTIC Thesaurus Topics

  • Automatic
  • Buildings And Structures
  • Circuits
  • Control Systems
  • Electronics
  • Electronics Laboratories
  • Fabrication
  • Instrumentation
  • Integrated Circuits
  • Microcircuits
  • Misalignment
  • Networks
  • Production
  • Research Facilities

Readers

  • Computer Vision.
  • Control Systems Engineering.
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems