STUDY OF POLARITY DETERMINATION IN SILICON CARBIDE STRUCTURE BY ETCHING METHOD,
Abstract
The authors describe their experiments on negative and positive c faces in silicon carbide. The authors conclude that the faces can be distinguished by observing the bluntness and sharpness of the edges occurring due to etching speed variation, and the positive c face is a carbon face and the negative one, a silicon face.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 26, 1968
- Accession Number
- AD0683199
Entities
People
- Kuo Ch'ang-lin
- T'ang Shih-hsin
Organizations
- National Air and Space Intelligence Center