CORRECTION FACTOR TABLES FOR FOUR-POINT PROBE RESISTIVITY MEASUREMENTS ON THIN, CIRCULAR SEMICONDUCTOR SAMPLES.

Abstract

Extensive tables of the geometrical correction factors for four-point probe resistivity measurements on thin, circular semiconductor samples with all surfaces insulating are given, (1) for an in-line probe array displaced radially with points along a diameter, (2) for an in-line probe array displaced radially with the line of points perpendicular to a diameter, and (3) for a displaced square probe array. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 15, 1964
Accession Number
AD0683408

Entities

People

  • Lydon J. Swartzendruber

Organizations

  • National Institute of Standards and Technology

Tags

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Diameters
  • Electronics
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Measurement
  • Semiconductors
  • Silicon Carbide
  • Silicon Compounds
  • Solid State Electronics

Readers

  • Electrical Engineering
  • Fluid Dynamics.
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene