VAPOR SOLID NUCLEATION: KINETICS OF FORMATION OF EPITAXIAL THIN FILMS.

Abstract

The objective of the work was to clarify the interrelationship of competitive processes in the incidence of epitaxy in the vapor deposition system gold on molybdenum. A new contamination effect caused by oil diffusion pumps was discovered that caused an evanescent approach toward the major objective. For this reason a getter pump LEED system was constructed in order that structures formed during vapor deposition could be discerned in a contaminant free system. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 31, 1969
Accession Number
AD0683531

Entities

People

  • R. D. Gretz

Organizations

  • Battelle Memorial Institute

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Contamination
  • Diffusion
  • Diffusion Pumps
  • Environmental Pollutants
  • Films
  • Kinetics
  • Materials
  • Materials Processing
  • Molybdenum
  • Nucleation
  • Pumps
  • Thin Films
  • Vapor Deposition

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.