HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
The program is devoted to the preparation and investigation of novel electron-beam-addressable storage mosaics and to the construction of an experimental, large-capacity, high-speed data-storage system utilizing such mosaics. At present, emphasis is on so-called micro-cap mosaics, the elements of which are discrete, submicron-size capacitors at the bases of regular arrays of closely spaced holes in molybdenum/alumina/molybdenum film sandwiches on sapphire substrates. Further work is described on the use of a fine-mesh screen as an array of lenses for electron-sensitive resist exposure. First result of using (1) the screen-lens resist-exposure technique, (2) ion-beam sputtering of molybdenum, and (3) tantalum-fluoride etching of alumina in succession to form arrays of holes having the ultimate packing density are described. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1969
- Accession Number
- AD0688178
Entities
People
- Louis N. Heynick
Organizations
- SRI International