THIN-FILM DIELECTRICS FOR MICROELECTRONICS: A BIBLIOGRAPHY COMPILATION.

Abstract

The report was in response to a request for information on various thin-film dielectric materials used for making capacitive elements in microelectronics circuitry. Included are sections on the following: Thin film capacitors (general); Silicon monoxide film capacitors; Silicon dioxide film capacitors; Silicon nitride film capacitors; Tantalum oxide and other tantalate film capacitors; Titanium oxide film capacitors; Aluminum oxide film capacitors; Hafnium oxide film capacitors; Barium titanate and other titanate film capacitors; Solium niobate and other niobate film capacitors; Miscellaneous materials film capacitors.

Document Details

Document Type
Technical Report
Publication Date
Jul 03, 1968
Accession Number
AD0689755

Entities

People

  • John T. Milek

Organizations

  • Hughes Aircraft Company

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aluminum Oxides
  • Barium Titanates
  • Capacitors
  • Ceramic Materials
  • Dielectrics
  • Films
  • Materials
  • Microelectronics
  • Oxide Films
  • Oxides
  • Silicon Dioxide
  • Thin Film Capacitors
  • Thin Films
  • Titanium
  • Titanium Oxides

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene