HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
This program is devoted to the preparation and investigation of novel electron-beam-addressable storage mosaics and to the construction of an experimental large-capacity high-speed data-storage system utilizing such mosaics. At present, emphasis is on so-called micro-cap mosaics, the elements of which are discrete, submicron-size capacitors at the bases of regular arrays of closely spaced holes in molybdenum/alumina/molybdenum film sandwiches on sapphire substrates. A fine-mesh screen is used as an array of electrostatic lenses for mosaic-pattern exposure on electron-sensitive resist. Further experimental work toward the development of a vacuum etching process for the selective removal of molybdenum is covered. The results thus far indicate that ion-beam sputtering is still the most useful process for this purpose. Prior theoretical calculations of lens aberrations indicated that with a field-emitter source, adequate on-axis spot sizes should be obtained at long throw distances (17 cm). Experimental confirmation for throw distances up to about 10 cm was achieved this quarter in the brass lens system. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1969
- Accession Number
- AD0691130
Entities
People
- Louis N. Heynick
Organizations
- SRI International