STRAIN SENSITIVITY IN INDIUM ANTIMONIDE FILMS,

Abstract

The stress effect was measured and the effects of electron concentration and film thickness on stress-sensitivity were studied in InSb thin films deposited by flash evaporation of commercial InSb powder on a heated glass substrate. Concentration of electrons varied by autodoping within 5 x 10 to the 16th power to 3 x 10 to the 18th power electrons/cc. Electrical characteristics of the films of varied thickness (0.3-1.9 micrometers) were measured and the data were tabulated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 30, 1969
Accession Number
AD0694844

Entities

People

  • E. I. Bolvanovich
  • N. N. Sirota

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Antimonides
  • Electrons
  • Evaporation
  • Films
  • Indium
  • Indium Antimonides
  • Micrometers
  • Sensitivity
  • Substrates
  • Thickness
  • Thin Films

Readers

  • Mechanical Engineering/Mechanics of Materials.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems