THE VACUUM DEPOSITION OF MOLYEDENUM-GOLD FILMS FOR SILICON CONTACT TECHNOLOGY,

Abstract

Contact systems for silicon devices are surveyed. A procedure for the vacuum deposition of composite Mo-Au film contacts on passivated silicon is described and critical parameters discussed. Bonding data and MOS capacitor properties are given. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1969
Accession Number
AD0695256

Entities

People

  • E. C. Rich

Tags

DTIC Thesaurus Topics

  • Capacitors
  • Composite Materials
  • Deposition (Materials Processing)
  • Electronic Components
  • Materials
  • Materials Processing
  • Vacuum Deposition

Readers

  • Thin Film Deposition Science.