LOW-VALUE TANTALUM THIN-FILM RESISTORS,
Abstract
Low value resistors were fabricated with mean values within about 10 percent of design and with confidence limits (2 sigma) within about plus or minus 20 percent of the mean, which compare favorably with the results previously reported on tantalum thin-film resistors greater than 3.3 kohms. The best resistors were designed with parallel elements having 1/2-mil line widths and an aspect ratio (length/width) of 4. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1969
- Accession Number
- AD0695673
Entities
People
- Albert D. Bender
- Stuart I. Lieberman
Organizations
- Harry Diamond Laboratories