NEW VACUUM EQUIPMENT FOR DEPOSITING THIN FILMS,

Abstract

A new device for depositing thin metal films in a vacuum is presented, and its application for depositing thin film electrodes on quartz resonators is discussed in detail. The apparatus permits elements to be coated and sealed without exposing them to the atmosphere and makes possible electrodes of any configuration. It can also be used to adjust oscillation frequency to nominal. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 21, 1969
Accession Number
AD0695888

Entities

People

  • E. V. Churkin
  • V. A. Yugov

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Atmospheres
  • Electrodes
  • Electronic Equipment
  • Films
  • Frequency
  • Metal Films
  • Oscillation
  • Quartz Resonators
  • Resonators
  • Thin Films

Fields of Study

  • Physics

Readers

  • Microwave Engineering.
  • Surface Engineering/Surface Coating Technology.
  • Thermal Physics or Thermal Science.