COMPUTER-AIDED TECHNIQUE FOR THE ACCURATE DETERMINATION OF THE SEMICONDUCTOR IMPURITY DOPING PROFILE.
Abstract
The basic equations for the determination of semiconductor net impurity doping profiles are derived. A computer technique is introduced which aids the accurate solution of the basic equations. The described method is mathematically rigorous and represents a vast improvement over previously used techniques. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1969
- Accession Number
- AD0697127
Entities
People
- Joseph J. Baranowski
- Vincent J. Higgins
Organizations
- United States Army Communications-Electronics Command