VACUUM DEPOSITION OF THIN FILMS,

Abstract

The book deals with methods of obtaining and processing thin films, methods of measuring the deposition rate and thickness of thin-film layers, and the main fields of application of thin films. Vacuum requirements and the requirements for the composition of the residual medium in thermal evaporation and cathode sputtering are given, and modern methods of producing and measuring vacuums and the equipment used in obtaining thin films are described. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 15, 1969
Accession Number
AD0698108

Entities

People

  • B. S. Danilin

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Deposition (Materials Processing)
  • Evaporation
  • Films
  • Materials
  • Materials Processing
  • Processing Equipment
  • Residuals
  • Sputtering
  • Thickness
  • Thin Films
  • Vacuum Deposition

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.