MASS SPECTROMETRIC STUDY OF ION-NEUTRAL REACTIONS IN RADIOFREQUENCY DISCHARGES IN CARBON DIOXIDE.

Abstract

Abundances of positive ions and neutral molecules emanating from an active radiofrequency discharge in CO2 at pressures from 0.01 to 1 torr have been determined mass-spectrometrically. The data are used to evaluate rate constants for ion-neutral reactions occurring in the discharge. The results are in agreement with previous results for reactions occurring in an electron-impact ion source and in thermalized flowing afterglows. The large yield of O2(+) at the higher discharge pressures is attributed mainly to charge transfer to O2, the significance of which is enhanced by an increase in effective reaction time with increased CO2 pressure. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1969
Accession Number
AD0698192

Entities

People

  • J. G. Collins
  • J. L. Franklin
  • Steven M. Schildcrout

Organizations

  • Purdue University

Tags

DTIC Thesaurus Topics

  • Afterglows
  • Agreements
  • Carbon Dioxide
  • Charge Transfer
  • Charged Particles
  • Cooperation
  • Electrons
  • Ion Sources
  • Ions
  • Molecules
  • Radio Frequency
  • Reaction Time

Readers

  • Molecular Photonics/Laser Physics

Technology Areas

  • Microelectronics