STRUCTURE OF MOLYBDENUM AND TUNGSTEN FILMS OBTAINED BY THERMAL DECOMPOSITION OF THE CARBONYLS IN VACUUM,
Abstract
The texture and morphology of Mo and W films obtained from the corresponding carbonyls at 150-1000C were studied. Initially, films with mirror brightness were obtained. The finely dispersed structure was retained up to 250C for Mo and up to 350C for W. Above these temperatures drop-like formations developed. The size of these drops increased to a maximum at 600C for Mo and at 700C for W. Above these temperatures the size decreased and finally vanished at 700C for Mo and at 800C for W. The morphological structure on substrates of Mo, W, Ta, Nb, and Ti is similar. At 450-650C the (111) texture of Mo films dominated, whereas at 750-1000C the preferred orientation was (100). At 650-750C both textures were present. The morphological changes affected the reaction between crystal planes and the gaseous medium. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 20, 1969
- Accession Number
- AD0700312
Entities
People
- A. A. Rozen
- N. N. Matyushenko
- V. V. Sagalovich
Organizations
- National Air and Space Intelligence Center