RULED GRATINGS FOR X-RAY AND FAR ULTRAVIOLET SPECTRA.
Abstract
A new process for making ruled gratings is described. A protective film of molybdenum and gold of about 300 A is sputtered on blanks of glass or quartz. A sharp pointed diamond properly loaded is used to cut a fine ruling through the protective film and slightly into the blank. Hydrofluoric acid is then used to etch a groove of the required depth and width. The grating is then coated with a reflectance coating of gold or platinum to increase its efficiency. With close control of the ratio of flat to groove width, one should be able to make a grating which maximizes intensity for a desired order and minimizes it for other selected neighboring orders. Technical details on various parts of the process are described. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 21, 1969
- Accession Number
- AD0700352
Entities
People
- J. Alvin Bearden
Organizations
- Johns Hopkins University