COMPUTER PROCESSING OF SEM IMAGES BY CONTOUR ANALYSES.

Abstract

Techniques involving the computer processing of scanning electron microscope (SEM) images using a contouring approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis. A program finds and analyzes coordinate arrays representing the reconstructed computer picture. Least squares fitting of the contour arrays to ellipses provides measurements of the aspect ratios and orientations of the picture fields. Line integration techniques produce areas and perimeters. Computer plotting enables both the visual comparison of the reconstructed picture with a photograph of the image on the cathode ray type of the SEM and an estimate of the accuracy of the ellipse fits. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 09, 1970
Accession Number
AD0701782

Entities

People

  • Eugene W. White
  • Gerald G. Johnson Jr.
  • Herbert A. Mckinstry
  • Ralph E. Mcmillan
  • William L. Matson

Organizations

  • Pennsylvania State University

Tags

DTIC Thesaurus Topics

  • Accuracy
  • Aspect Ratio
  • Computers
  • Electron Microscopes
  • Images
  • Magnetic Tape
  • Measurement
  • Microscopes
  • Photographs
  • Photography
  • Scanning Electron Microscopes

Fields of Study

  • Physics

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)

Technology Areas

  • Microelectronics