COMPUTER PROCESSING OF SEM IMAGES BY CONTOUR ANALYSES.
Abstract
Techniques involving the computer processing of scanning electron microscope (SEM) images using a contouring approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis. A program finds and analyzes coordinate arrays representing the reconstructed computer picture. Least squares fitting of the contour arrays to ellipses provides measurements of the aspect ratios and orientations of the picture fields. Line integration techniques produce areas and perimeters. Computer plotting enables both the visual comparison of the reconstructed picture with a photograph of the image on the cathode ray type of the SEM and an estimate of the accuracy of the ellipse fits. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 09, 1970
- Accession Number
- AD0701782
Entities
People
- Eugene W. White
- Gerald G. Johnson Jr.
- Herbert A. Mckinstry
- Ralph E. Mcmillan
- William L. Matson
Organizations
- Pennsylvania State University