TUNNELING SPECTROSCOPY IN DEGENERATE p-TYPE SILICON,

Abstract

Tunneling in boron doped p-type silicon metal-semiconductor (MS) and metal-insulator-semiconductor (MIS) tunnel junctions has been studied at low temperatures by measuring the derivatives, dI/dV and the second derivative of I with respect to V, of the current-voltage characteristics as functions of applied bias voltage V. Junctions were prepared by evaporating metal contacts onto vacuum or air cleaved silicon surfaces. The general features of the tunneling conductance were found to be in qualitative agreement with existing theories of tunneling in semiconductors. Structure in the derivative data resulting from the interaction of tunneling electrons with silicon zone center phonons and boron local mode phonons has been observed. The optical phonon lineshapes in the most heavily doped MIS units are shown to compare well with the theoretical lineshapes in which modifications in the bulk semiconductor states arising from electron-optical phonon interactions in the semiconductor electrode have been included. The origin of the optical phonon and local mode phonon structure in samples of lower doping is not fully understood. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1970
Accession Number
AD0701973

Entities

People

  • D. E. Cullen
  • E. L. Wolf
  • W. Dale Compton

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bulk Semiconductors
  • Compound Semiconductors
  • Crystal Lattice Vibrations
  • Electrons
  • Low Temperature
  • Metal Contacts
  • Phonons
  • Quantum Tunneling
  • Semiconductors
  • Tunneling

Fields of Study

  • Materials science
  • Physics

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene