INTEGRATED MICROMOTOR CONCEPTS,

Abstract

The concept of an integrated micromotor is introduced and the philosophy of operation and fabrication are discussed. The motor considered has a working surface which covers a circular area of 200 microns radius. The final device has an eddy current driven free rotor floating on spiral groove bearings and is processed on a silicon chip using monolithic and compatible thin film fabrication techniques. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1970
Accession Number
AD0707622

Entities

People

  • B. Sharma
  • K. Dutta
  • P. Dev
  • R. Dewilde
  • R. W. Newcomb

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Cooperation
  • Eddy Currents
  • Electrical Engineering
  • Engineering
  • Fabrication
  • Films
  • Maryland
  • Philosophy
  • Systems Engineering
  • Thin Films

Readers

  • Fluid Dynamics.
  • Integrated Circuit Design and Technology.
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).