A COMPUTER STUDY OF CHANNELING IN SILICON.

Abstract

A computer simulation study is reported of channeling in a diamond lattice. The simulation was done for a Xenon ion striking the (100), (110) or (111) surface of a silicon target. Potential functions for the Si-Si lattice bond and the Xe-Si interaction are postulated. The electronic stopping cross section for the <110> channel of silicon is estimated. The work is a continuation in the development of a computer model which takes into consideration the displacement of the atoms in the target lattice as well as inelastic energy losses by the primary ion. The lattice was not thermalized and only the repulsive portion of the lattice-lattice potential was used. Computer ranges are in good agreement with experimental date. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1969
Accession Number
AD0707727

Entities

People

  • Roy Stephen Finno

Organizations

  • Naval Postgraduate School

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Agreements
  • Computer Simulations
  • Computers
  • Displacement
  • Simulations
  • Simulators

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Molecular Photonics/Laser Physics
  • Quantum Chemistry

Technology Areas

  • Microelectronics